Handbook of Semiconductor Manufacturing Technology
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A guide to the individual processes, equipment, and materials of semiconductor manufacturing technologies. It features chapters on silicon materials, SOI materials and devices, surface preparation, ion implantation, dopant diffusion, in-line metrology, yield modeling, photomask fabrication, failure analysis, and damascene copper electroplating.
| Nakladatel: | Taylor & Francis Inc |
| ISBN: | 9781574446753 |
| Rok vydání: | 2007 |
| Jazyk : | Angličtina |
| Vazba: | Hardback |
| Počet stran: | 1720 |
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