Enabling Technologies for MEMS and Nanodevices
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PREFACE§§M3: THE THIRD DIMENSION OF SILICON§§TRENDS IN MEMS COMMERCIALIZATION§§CAPACITIVE INTERFACES FOR MEMS§§PACKAGING OF ADVANCED MICRO- AND NANOSYSTEMS§§HIGH-FREQUENCY INTEGRATED MICROELECTROMECHANICAL RESONATORS§§MEMS IN MASS STORAGE SYSTEMS§§SCANNING MICRO- AND NANOPROBES FOR ELECTROCHEMICAL IMAGING§§NANOFLUIDIC MODELING AND SIMULATION§§NANOFLUIDICS ? STRUCTURES AND DEVICES§§CARBON NANOTUBES AND SENSORS: A REVIEW§§CMOS-BASED DNA SENSOR ARRAYS M3: the Third Dimension of Silicon§Trends in MEMS Commercialization§Capacitive Interfaces for MEMS§Packaging of Advanced Micro- and Nanosystems§High-frequency Integrated Microelectromechanical Resonators and Filters§MEMS in Mass Storage Systems§Scanning Micro- and Nanoprobes for Electrochemical Imaging§Nanofluidic Modeling and Simulation§Nanofluidics -§Structures and Devices§Carbon Nanotubes and Sensors§CMOS-based DNA Sensor Arrays
| Autor: | Baltes, Henry |
| Nakladatel: | Wiley-VCH |
| Rok vydání: | 2013 |
| Jazyk : | Angličtina |
| Vazba: | Paperback / softback |
| Počet stran: | 427 |
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