Manufacturing Techniques for Microfabrication and Nanotechnology
3686 Kč
Sleva až 70% u třetiny knih
Focuses on various trends in industrial lithography and pattern transfer. This book covers photo lithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. It explains thermal, electro thermal, and mechanical removing techniques.
| Autor: | Madou, Marc J. (University of California, Irvine, USA) |
| Nakladatel: | Taylor & Francis Inc |
| ISBN: | 9781420055191 |
| Rok vydání: | 2009 |
| Jazyk : | Angličtina |
| Vazba: | Hardback |
| Počet stran: | 670 |
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